| Skip to main content | Skip to sub navigation |

This is now an inactive research group it's members have moved on. You can find them at their new research groups:

ECS Intranet:
Micromachined Actuators

Micromachined actuators have a range of applications, e.g. for the integration of an Atomic Force Microscope (AFM) on a single chip, novel lithography techniques, micro-switches, etc.
The project investigates thermal actuators to realise movement along three axes. A micro-fabrication process has been developed that allows to produce in-plane bimorphs consisting of aluminium and silicon. An actuator stage is being designed having a platform on which an atomically sharp tip can be placed. This can be used for scanning an area of a sample, thus obtaining an image of the sample topology. The actuators incorporate piezo-resistors which result in a resistance change proportional to strain due to surface-tip interaction.

Homepage: http://www.micro.ecs.soton.ac.uk/mems/
Type: Normal Research Project
Research Groups: Nano Research Group, Southampton Nanofabrication Centre
Theme: MEMs and NEMs
Dates: ? to ?


Principal Investigators

URI: http://id.ecs.soton.ac.uk/project/114
RDF: http://rdf.ecs.soton.ac.uk/project/114

More information

You can edit the record for this project by visiting http://secure.ecs.soton.ac.uk/db/projects/editproj.php?project=114